AN <i>IN SITU</i> MODULE FOR PARTICLE REMOVAL FROM SOLID-STATE SURFACES

摘要

An apparatus (10) and a method for removing particles from the surface of a substrate (30) include determining respective position coordinates of the particles on the surface. A beam of electromagnetic energy is directed via an optical cleaning arm (40) at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.