DEVICE AND METHOD FOR COUPLING TWO CIRCUIT COMPONENTS WHICH HAVE DIFFERENT IMPEDANCES
摘要
An AC power feed device for conducting electrical power from a source to a load. The feed device has a constant characteristic impedance along its length and an outer periphery that varies in size progressively along its length, or the feed device has an input end connected to the match network and an output end connected to an electrode, and has a characteristic impedance with varies from a value substantially equal to the output impedance of a match network coupled at the input end to a value equal to the impedance of the electrode.
申请公布号
WO0159804(A3)
申请公布日期
2002.05.30
申请号
WO2001US40073
申请日期
2001.02.09
申请人
TOKYO ELECTRON LIMITED;MITROVIC, ANDREJ, S.;WINDHORN, THOMAS, H.;JOHNSON, WAYNE, L.
发明人
MITROVIC, ANDREJ, S.;WINDHORN, THOMAS, H.;JOHNSON, WAYNE, L.