| 摘要 |
PURPOSE: An emitter of an FED(field emission display) using carbon nano tube and employing a side metal electrode is provided to grow carbon nano tube at a low temperature for using glass as a substrate and use a metal electrode as a cathode electrode with carbon nano tube. CONSTITUTION: An emitter of an FED comprises a support layer(1), a catalyzing metal layer(2) on the support layer(1), and a cathode electrode(4), an insulating layer(5) and a gate electrode(6) layered sequentially on the catalyzing metal layer(2). The support layer(1) is formed by glass. The catalyzing metal layer(2) is coated by Fe or Ni by electron beam deposition, sputtering or CVD(chemical vapor deposition). The cathode electrode(4) is made of conductive material such as molybdenum, tantalum, tungsten, chromium or copper, and is formed on the catalyzing metal layer(2) patterned by photolithography. The insulating layer(5) is made of SiO2 or SiN by electron beam deposition, sputtering or CVD. The gate electrode(6) is made of tungsten.
|
