Anlage zur Abscheidung dünner Schichten,申请号DE20012020783U-传众专利搜索

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发明名称	Anlage zur Abscheidung dünner Schichten
摘要
申请公布号	DE20120783(U1)	申请公布日期	2002.05.29
申请号	DE20012020783U	申请日期	2001.12.21
申请人	AXYNTEC DUENNSCHICHTTECHNIK GMBH	发明人
分类号	C23C14/28;(IPC1-7):C23C14/34	主分类号	C23C14/28
代理机构		代理人
主权项
地址

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