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发明名称
Verfahren zum Prüfen von Unterbrechungen/Kurschlüssen bei kapazitiv gekoppelten Netzen in Substraten unter Verwendung von Elektronenstrahlen
摘要
申请公布号
DE69033851(T2)
申请公布日期
2002.05.29
申请号
DE19906033851T
申请日期
1990.02.20
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
RASCH, JUERGEN;GOLLADAY, STEVEN DOUGLAS;HOHN, FRITZ JUERGEN;HUTSON, DAVID JOSEPH;MEISBURGER, WILLIAM D.
分类号
G01R31/302;G01Q60/40;G01R19/00;G01R19/165;G01R31/305;G01R31/307;H01L21/66;(IPC1-7):G01R31/305
主分类号
G01R31/302
代理机构
代理人
主权项
地址
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