<p>A microejector pump for generating microdrops includes at least one pump chamber configured in a silicon chip and a piezoelectrically actuable silicon membrane arranged over the pump chamber. The pump chamber is connected to at least one supply line as well as a discharge line provided with an ejection orifice. A glass chip closes off at least the pump chamber from the silicon membrane. The microejector pump can also include an integral heater and controller.</p>
申请公布号
EP0956449(B1)
申请公布日期
2002.05.29
申请号
EP19970951842
申请日期
1997.12.11
申请人
GESIM GESELLSCHAFT FUER SILIZIUM-MIKROSYSTEME MBH
发明人
HOWITZ, STEFFEN;BUERGER, MARIO;WEGENER, THOMAS;GEHRING, THOMAS