Microvalve for controlling fluid flows, has electrostatic comb drive with two comb structures coupled to valve housing and valve element with mutually engaged sets of electrodes

摘要

The device has at least one valve element (5) with an actuation drive arrangement (12) based on electrostatic principles. The drive arrangement contains at least one so-called comb drive (14a, 14b) with a first comb structure (15) fixed to the valve housing (2) and with a first set of electrodes and a second comb structure (16) coupled to the valve element and with a second set of electrodes engaging the first set of electrodes.