Npn-heterojunction bipolar transistor including an antimonide base formed on semi-insulating indium phosphide substrate

摘要

A heterojunction bipolar transistor (HBT) (10, 30) includes an indium-gallium-arsenide (InGaAs), indium-phosphide (InP) or aluminum-indium-arsenide (AlInAs) collector layer (14) formed over an indium-phosphide (InP) substrate (12). A base layer (16, 32) including gallium (Ga), arsenic (As) and antimony (Sb) is formed over the collector layer (14), and an AlInAs or InP emittor layer (18) is formed over the base layer (16, 32). The base layer may be ternary gallium-arsenide-antimonide (GaAsSb) doped with beryllium (Be) (16) (Fig. 1). <IMAGE>