SIDEWALL POLYMER FORMING GAS ADDITIVES FOR ETCHING PROCESSES,申请号EP20000950996-传众专利搜索

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发明名称	SIDEWALL POLYMER FORMING GAS ADDITIVES FOR ETCHING PROCESSES
摘要
申请公布号	EP1208588(A1)	申请公布日期	2002.05.29
申请号	EP20000950996	申请日期	2000.08.03
申请人	APPLIED MATERIALS, INC.	发明人	WILLIAMS, RANEY;CHINN, JEFFREY;TREVOR, JITSKE;LILL, THORSTEN, B.;NALLAN, PADMAPANI;VARGA, TAMAS;MACE, HERVE
分类号	H01L21/302;H01L21/3065;H01L21/311;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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