The pattern carrier, has a recess pattern for holding a gaseous medium which subsequently (with the pattern carrier in contact with a synchronously moving substrate) is precipitated as a capacitor film. The recess pattern incorporates a bottom region (7) which has a greater capacity for absorption of the gaseous medium than the surface coming into contact with the substrate.
申请公布号
EP0955391(A3)
申请公布日期
2002.05.29
申请号
EP19990102184
申请日期
1999.02.04
申请人
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AKTIENGESELLSCHAFT
