发明名称 |
PHOSPHOREFFUSIONSZELLE ZUR HERSTELLUNG MOLEKULARER STRAHLEN, DIE AUF EIN SUBSTRAT AUFGEBRACHT WERDEN |
摘要 |
This invention is a sublimating and cracking apparatus for producing a beam of molecules to be deposited on a substrate, and an apparatus which is particularly useful with phosphorus as the source material. In the phosphorus effusion cell of this invention, a vacuum jacket encloses and supports a red phosphorus crucible, a condensing crucible for white phosphorus and a connecting tube within a vacuum space. In use, red phosphorus is first transformed and deposited as white phosphorus in the condensing chamber. The white phosphorus is then directed to a cracker section where it is cracked and subsequently directed to the substrate. |
申请公布号 |
DE69805080(D1) |
申请公布日期 |
2002.05.29 |
申请号 |
DE1998605080 |
申请日期 |
1998.02.17 |
申请人 |
APPLIED EPI, INC. |
发明人 |
COLOMBO, E.;PRIDDY, SCOTT |
分类号 |
C23C14/24;C30B23/06;(IPC1-7):C23C14/24 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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