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发明名称
ELECTRON BEAM APPARATUS HAVING A LOW LOSS BEAM PATH
摘要
申请公布号
EP1208581(A1)
申请公布日期
2002.05.29
申请号
EP20000957276
申请日期
2000.08.01
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
WEISS, DOUGLAS, E.;DIZIO, JAMES, P.;KALWEIT, HARVEY, W.;SCHLEMMER, ROY, G.;SVENTEK, BRUCE, A.
分类号
G21K5/04;C08F2/54;G21K5/00;H01J33/04;(IPC1-7):H01J33/04
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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