发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor memory device and a method of manufacturing the particular semiconductor memory device are provided to increase the degree of integration without decreasing the capacitance of the capacitor included in a memory cell. CONSTITUTION: The semiconductor memory device comprises a semiconductor substrate(1), an interlayer insulating film(4) formed on the semiconductor substrate, a first electrode formed on the interlayer insulating film, a first ferroelectric film(10) formed on the first electrode, a second electrode formed on the first ferroelectric film, a second ferroelectric film(12) formed on the second electrode, and a third electrode formed on the second ferroelectric film.
申请公布号 KR20020039260(A) 申请公布日期 2002.05.25
申请号 KR20010072199 申请日期 2001.11.20
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KANAYA HIROYUKI;KUMURA YOSHINORI;KUNISHIMA IWAO
分类号 H01L27/105;H01L21/02;H01L21/8246;H01L27/115;(IPC1-7):H01L27/105 主分类号 H01L27/105
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