| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment system wherein workpieces are transferred in a slot of a magazine. SOLUTION: This plasma treatment system is equipped with a first and a second plasma treatment chambers installed on a common base. In order to receive a magazine, a standby station is arranged on the base. A magazine handler moves magazines to a position adjacent to one out of the first and second plasma treatment chambers. A workpiece handler transfers workpieces between the magazine and one out of the first and second plasma treatment chambers. The workpiece handler is provided with a workpiece translating apparatus accompanying a first surface coming into contact with a first edge of the workpiece, in order to push the workpiece into the plasma treatment chamber. The workpiece translating apparatus is provided with a second surface coming into contact with an opposite side edge of the workpiece, in order to push out the workpiece from the plasma treatment chamber. Various methods are used for automatic handling of workpieces, in order to use plural plasma treatment chambers on one base, and to charge and discharge the workpieces in and from the chamber. |
