| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a low-cost liquid metal ion source. SOLUTION: This is a manufacturing method of a liquid metal ion source, which comprises a storage part that stores a metal to be ionized and a needle- shape electrode that is supplied with a metal from the storage part, and a liquid metal is wetted and spread over the needle-shape electrode surface, in a state whit inert gas being introduced in the container. Likewise, a manufacturing method of a liquid metal ion source in which metal is filled in the storage part is also provided.
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