| 摘要 |
PROBLEM TO BE SOLVED: To provide a treating system of an object to be treated which has transfer mechanism wherein an occupied area is reduced by miniaturization and teaching is enabled in a short time. SOLUTION: This treating system consists of treating apparatuses 12A, 12B for performing prescribed treatment to the object W to be treated, and a transfer mechanism 20 for transferring the object to be treated to the treating apparatuses. The transfer mechanism is equipped with a transfer arm 70 constituted of an upper stage and a lower stage which can be controlled independently in order to transfer the object, and a control unit 80 which controls the arm 70 in such a manner that only the lower stage transfer arm is used when the object after treatment is finished in the treating apparatuses is transferred. As a result, the transfer mechanism is miniaturized, its occupied area is reduced, and teaching can be enabled in a short time. |
