摘要 |
PROBLEM TO BE SOLVED: To improve moisture resistance of an organic resin substrate to secure reliability of an EL element in addition to the other important factors of a compact size and impact resistance. SOLUTION: Hard carbon film is formed on the surface of an organic resin substrate, to cover an outer face of a sealing material. Typically, a DLC(Diamond-like Carbon) film is used. The DLC film has an SP3 coupling as carbon-carbon bond in short distance order, but has an amorphous structure macroscopically. The DLC film is composed of 95 to 70 atom percent of carbon and 5 to 30 atom percent of hydrogen, very hard and dense, and excellent in gas barrier and insulation property. |