| 摘要 |
PURPOSE: A semiconductor chip test apparatus using a master-slave method is provided, which improves the whole operation speed of the test apparatus by reducing the whole electrostatic capacity of a load. CONSTITUTION: A signal generator(80) receives every kinds of signals like a control signal(C), an address signal(A) and a data signal(D) and converts the received signals into a number of high output signals, and applies them to a number of slave test units(60-1,60-2,...,60-n) in common, and receives test result signals(R1,R2,...,Rn) from the slave test units. Each slave test unit includes data comparison processing unit inputting/outputting every kinds of signals to corresponding pins of a semiconductor chip and comparing/testing the data signal being output from the pin at the same position of the semiconductor chip to be tested. The test apparatus further includes buffers(90a,90b).
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