| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a crystalline semiconductor thin-film solar cell in which, with lower defective density in the crystalline semiconductor, the light confinement effect is substantially provided by the rough of the substrate surface. SOLUTION: A substrate is used which has a texture structure with R/L 0.1-1.5 where R is magnitude of rough and L is interval of rough. On the substrate, a first conductivity type silicon crystalline semiconductor layer and an intrinsic silicon crystalline semiconductor layer are formed under a condition with a large amount of channeling particles. The photoelectric transducer structure of the thin-film solar cell thus formed is formed of the crystalline semiconductor layer growing as pillars in the direction vertical to the substrate.</p> |
