| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-pressure discharge lamp and a semiconductor aligner, using the high pressure discharge lamp, suitable for a large wattage and large-current type, wherein withstanding pressure strength of required fused quartz bulb is secured, generation of process failures or initial failures during transportation and handling are prevented, and reliability of sealing parts can be secured, until the end of the lamp lifetime. SOLUTION: This has a fused quartz bulb 1 is equipped with an enclosure part 1a and a sealing tube part 1b, a positive electrode 2 with a total length of L (mm), where the base end part of an electrode shaft part 2a with a diameter of d (mm) is connected to an inner end of plural sealing metal foils 4a and supported by a sealing part 4 and not less than 100 positive electrode main parts 2b having a weight of M (g) are arranged and installed, the sealing part 4 including sealing metal foils 4a, a fused quartz columnar body 4b and a fused part 1b2 of a sealing tube part 1b, an external reed member, a negative electrode 3, and a discharge medium; and these satisfy equation 1: 15×103<=L×M<=25×103, and equation 2: 400<=L×M/d2<=700.
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