| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical disk master disk by which recessed parts having different depths in the same plane of the optical disk master disk can easily be formed. SOLUTION: In the method for manufacturing an optical disk master disk 9 with recessed parts having two kinds of depths of a deep recessed part 7 and a shallow recessed part 8, an exposure value at which a film thickness after development begins to decrease by the increase of exposure value is defined as E0 and the minimum exposure value at which the film thickness becomes zero is defined as Eth. In the area where the deep recessed part is formed, a photoresist 2 applied on a substrate is irradiated with a light having an exposure value of Eth or more. In the area where the shallow recessed part is formed, the photoresist is irradiated with a light having an exposure value of E0 or less which does not expose the photoresist but generates heat deformation. Then, the recessed parts having two kinds of depths of the deep recessed part and the shallow recessed part are formed by developing the irradiated photoresist. Thereby, the recessed parts having different depths in the same plane of the optical disk master disk can easily be formed.
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