METHOD FOR REMOVING OXIDE FILM OF METAL ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide a method for realizing a stable discharging state under conditions of atmospheric pressure and for removing the oxide film of a metal electrode by a convenient apparatus. SOLUTION: In an atmosphere containing 0.5-50 vol% of oxygen under a pressure close to the atmospheric pressure, a solid state dielectric is provided on at least one of the opposite faces of a pair of opposite electrodes and discharge a plasma, generated by applying a pulse electric field between the pair of opposite electrodes, is brought into contact with the metal electrode prior to wire bonding.