| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetoresistive effect element which causes little performance fluctuation, is highly reliable, and is excellent in productivity. SOLUTION: The method of manufacturing the magnetoresistive effect element includes a step of preparing a substrate having a coefficient of thermal conductivity of 5-150 Wm-1K-1, a substrate cooling step of cooling the substrate in a vacuum cooling chamber after the substrate is moved to the cooling chamber, and a laminated film forming step of fixing the cooled substrate to a substrate holder and, at the same time, forming a laminated magnetoresistive effect film on the substrate while the substrate is rotated in a vacuum film forming chamber after the substrate is moved to the film forming chamber. |
