| 摘要 |
PROBLEM TO BE SOLVED: To achieve uniform stable substrate washing along with saving resource and waste reduction. SOLUTION: In a washing step of a substrate using a solution as a cleaning solution including fluorinated ammonium, the concentration of a given component is regularly measured. An element for correcting the density is replenished if necessary based on the measurement result. As an example, when the measured element is HF, and then the measurement result falls below the setting range, the HF element is replenished. When the measurement result exceeds the range of setting, an ammonia element is replenished.
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