PERFORMANCE EVALUATION METHOD, MAINTENANCE METHOD, PERFORMANCE MANAGEMENT SYSTEM, AND PERFORMANCE CONFIRMATION SYSTEM OF PLASMA TREATMENT DEVICE OR PLASMA TREATMENT SYSTEM, AND PLASMA TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To be able to evaluate simply and promptly whether a requested performance is maintained or not after a plasma treatment device is decomposed and rebuilt after carrying. SOLUTION: A plasma treatment chamber 60 having an electrode 4 to excite plasma, a high-frequency power supply 1 connected to the electrode 4, a matching circuit 2 to gain an impedance alignment of the plasma chamber 60 and the high-frequency power supply 1, are equipped. Performance is evaluated as to whether the value Cx1 after delivery of capacity Cx between the connected electrode 4 of the high-frequency power supply 1 of the plasma treatment chamber 60 and each grounding potential part grounded as direct current, is smaller than twenty six times the plasma electrode capacity Ce between the electrode 4 and an electrode 8 generating plasma in cooperation with the electrode 4.