| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element that is provided with electrodes with a more excellent breakdown voltage than those of a conventional surface acoustic wave element. SOLUTION: A Cu electrode film (or Cu alloy electrode film) 22 having tri-axis orientation is provided onto a piezoelectric substrate 2. Furthermore, an angle between a direction of a normal line of the (111) plane of the electrode film (or Cu alloy electrode film) 22 having tri-axis orientation and a direction of a normal line of the piezoelectric substrate 2 is selected to be 0-30-degrees. Moreover, a lower layer electrode film 21 made of Ti (or a Ti alloy) is provided between the piezoelectric substrate 2 and the electrode film (or Cu alloy electrode film) 22. A LiTaO3 or LiNbO3 substrate is employed for the piezoelectric substrate.
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