| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater for a semiconductor manufacturing/ inspecting apparatus which can secure its safety constantly without any detachment of a temperature measuring element, can realize accurate temperature measurement, and can heat an entire silicon wafer uniformly by adjusting a heated state of a heating element on the basis of the temperature measured result. SOLUTION: In the ceramic heater for a semiconductor manufacturing/ inspecting apparatus wherein the heating element is formed on a ceramic substrate or therein, a temperature measuring element is attached as compressed to the ceramic substrate.
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