| 摘要 |
PROBLEM TO BE SOLVED: To get a small type of a discharge generating device which has high utility factor of a discharge space, can generate discharge uniformly dispersed and distributed in the discharge space, and is capable of an efficient plasma treatment. SOLUTION: A first electrode part (50), a second electrode part (51) which is placed opposite with discharge space of a given length from the first electrode part, and a high-voltage power supply impressing high voltage to those electrode parts, are equipped, of which, at least either is to be a main electrode (51a) and a plurality of auxiliary electrodes (51b), and discharge plasma is generated in the discharge space by impressing high-voltage pulse having a precipitating rise and a short pulse width between the main electrode and the auxiliary electrodes, as well as the main electrode and the other electrode part. Also, the high-voltage pulse consists of backup pulse impressed between the main electrode and the auxiliary electrodes and a main pulse impressed between the main electrode and the other electrode part, where, after the backup pulse is impressed, the main pulse is impressed after a given delay time. |
