| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce leakage of air into a vacuum chamber from an air bearing which is used as a stage in vacuum equipment. SOLUTION: Plural trenches 310, 314, 318 which suck the air discharged from the air bearing are disposed around the air bearing. In a part between the trenches, a channel is narrowed and the flowing out air is reduced.</p> |
