发明名称 MOS LOW-VOLTAGE VERTICAL TRANSISTOR
摘要 The invention relates to an MOS low-voltage vertical transistor (VMT), in which the rear drain electrode (12) is connected to a drain region (7) that extends vertically, by means of a plug (11) in an isolation layer (9).
申请公布号 WO0241403(A2) 申请公布日期 2002.05.23
申请号 WO2001DE04005 申请日期 2001.10.19
申请人 INFINEON TECHNOLOGIES AG;SOMMER, PETER;TIHANY, JENOE 发明人 SOMMER, PETER;TIHANY, JENOE
分类号 H01L21/8242;H01L29/06;H01L29/417;H01L29/45;H01L29/78;H01L29/786 主分类号 H01L21/8242
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