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发明名称
HERSTELLUNG VON BEDECKTEN MIKROKANÄLEN
摘要
申请公布号
DE69712041(D1)
申请公布日期
2002.05.23
申请号
DE19976012041
申请日期
1997.01.30
申请人
UNIVERSITY OF WASHINGTON, SEATTLE
发明人
JONS, D.;O'CONNOR, J.;HU, ING-FEN
分类号
G01N27/447;G01N30/60;G03F7/00;(IPC1-7):G03F7/00
主分类号
G01N27/447
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代理人
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