COLLECTOR CUP ASSEMBLY OF CHARGE EXCHANGE OVEN APPARATUS

摘要

PURPOSE: A collector cup assembly of a charge exchange oven apparatus is provided to prevent damage to an aperture in a process for separating the aperture, by making the collector cup assembly composed of the aperture, a collector cup and a plate. CONSTITUTION: The collector cup assembly(110) functions as a path of an ion beam, connected to a charge exchange oven cell. The first opening(114a) having a diameter larger than that of the aperture(112) is formed on a surface of the collector cup(114) so that the aperture is inserted into the first opening. The plate(116) overlaps the surface of the collector cup so that the aperture does not pass through the first opening, having the second opening(116a) of a diameter smaller than that of the aperture.