Method and apparatus for fabricating electro-optical device and method and apparatus for fabricating liquid crystal panel

摘要

A method for manufacturing an electro-optical device deposited with an insulating film or alignment layer on the surface of a substrate, the method is characterized by including the step of irradiating ultraviolet radiation onto the surface of the substrate (an ultraviolet radiation irradiating step) and the step of depositing the insulating film or alignment layer on the surface of the substrate irradiated with the ultraviolet radiation (an insulating material coating step or alignment layer coating step).