| 摘要 |
PURPOSE: To eliminate the need for a U-shaped bar required for the conventional device, to reduce the number of parts as compared with a form having two base arms at right and left, size, and weight, to improve mechanical stiffness, and, furthermore, to lengthen the transfer distance in a double-arm substrate transfer device for transferring work such as a semiconductor wafer. CONSTITUTION: A robot arm comprises a tip arm A1 freely rotatably supported at the tip section of a base arm 20, an end effecter E1 freely rotatably supported at the tip section for placing the work, a tip arm A2 freely rotatably supported at the tip section of the base arm 20 and superimposed to the upper section of the tip arm A1 for mounting, and an end effecter E2 freely and rotatably supported at the tip section for placing the work. |
