| 摘要 |
PURPOSE: A dynamic manipulation method of a position of a module is provided to manipulate a corresponding component to an exact position only by some steps. CONSTITUTION: A method is used for dynamic manipulation and/or for adjustment of a module(2) or a component in an optical system, in particular in a microlithographic projection exposure objective(1) for manufacture of semiconductors. The module or component is displaced by at least two actuators(3,4), which have detectors(5) for determining at least their relative path displacements. A position of the module or component is determined by at least two sensors(14,15), the sensors and the actuators, with their detectors communicating with one another in the manner of a control loop. At least one impulse is exerted on the module or component by the actuators. The timing of the impulse is deliberately varied, to which end the displacement of the actuators is carried out with a time-variant velocity profile dictated as a function of a determined position of the module or component. A position of the module or component is re-determined after the velocity profile, has been executed. The aforementioned method steps are repeated until the desired position ssetpoint of the module or component is reached.
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