APPARATUS FOR SENSING WAFER OF SEMICONDUCTOR EQUIPMENT

摘要

PURPOSE: An apparatus for sensing a wafer of a semiconductor equipment is provided to prevent the breakage of a wafer by an isolation operation when the wafer is put between an isolation valve by installing a sensor at both sides of the open and close unit for connecting a wafer loading stock to a chamber. CONSTITUTION: A load stock(100) loads a wafer. An isolation valve(200) connects to a side of the load stock(100) and isolates the load stock(100). A process module(400) progresses a unit process on the wafer. A chamber(300) connects the isolation valve(200) to the process module(400). The sensing unit(500) senses whether the wafer exists between the load stock(100) and the isolation valve(200). The second sensing unit(600) senses whether the wafer exists between the isolation valve(200) and the chamber(300). The isolation valve(200) is controlled according to the existence of the wafer.