CHUCK FOR FIXING SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE MOUNTING SUCH CHUCK

摘要

PURPOSE: A chuck for fixing a substrate is provided to make the substrate for semiconductor/liquid crystal display used in a flat-zone or notch type, by easily making the position of the substrate easily controlled by a plurality of position control units installed along the outer circumference of the upper surface of the substrate when the substrate is loaded/unloaded by a robot arm. CONSTITUTION: A boss unit(11) is coupled to a rotation driving axis, formed in the rotation center on a lower surface of the substrate. A vacuum channel(12) is radially formed from the boss unit to the outer circumference of the upper surface of the substrate. An absorbing chamber(13) is formed in a circumferential direction in the outer circumference of the upper surface corresponding to the outer circumference of the substrate to process, connected to the vacuum channel. A plurality of position control units(15) of a predetermined height are installed in the outer circumference of the upper surface corresponding to the outer circumferential surface of the substrate.