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发明名称
COPPER DEPOSIT PROCESS
摘要
申请公布号
KR20020038723(A)
申请公布日期
2002.05.23
申请号
KR1020027001895
申请日期
2002.02.09
申请人
发明人
分类号
H01L23/48
主分类号
H01L23/48
代理机构
代理人
主权项
地址
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