发明名称 Bump forming method, semiconductor device and method of manufacturing the same, circuit board, and electronic instrument
摘要 A bump forming method having a step of patterning a resist layer so as to have a penetrating hole above a pad, a step of applying energy to cause cross-linking in the resist layer, and hardening at least a surface of the resist layer, and a step of forming a metal layer electrically connected to the pad within the penetrating hole.
申请公布号 US2002061641(A1) 申请公布日期 2002.05.23
申请号 US20010984223 申请日期 2001.10.29
申请人 SEIKO EPSON CORPORATION 发明人 YODA TSUYOSHI
分类号 H05K3/34;H01L21/60;(IPC1-7):H01L21/44 主分类号 H05K3/34
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