PLASMA PROCESSING COMPRISING THREE ROTATIONAL MOTIONS OF AN ARTICLE BEING PROCESSED

摘要

An article (134) which is being processed with plasma is moved during plasma processing so that the motion of the article comprises at least a first rotational motion, a second rotational motion, and a third rotational motion which occur simultaneously. The apparatus that moves the article comprises a first arm (150A) rotatable around a first axis, a second arm (140A) rotatably attached to the first arm and rotating the article around a second axis, and a rotational mechanism for inducing a rotational motion of the article in addition to, and simultaneously with, the rotation of the first and second arms.