| 摘要 |
<p>An optical inspection module (10, 140, 260, 300, 400, 600) and method are provided for detecting particles on a surface of a substrate (33, 270, 322, 416, 604). The module includes a substrate holding position, wherein the surface of the substrate (33, 270, 322, 416, 604) defines an object plane (274) at the substrate holding position. A light source (34, 154, 352, 404) illuminates substantially the entire substrate surface. A lens (80, 278, 294, 608) is oriented to collect light reflected from the light beam path by the substrate surface and has a lens plane (282, 296). A photodetector array (81, 276, 290, 358, 410, 610) has a plurality of pixels difining an image plane (280, 292) within a focal plane of the lens (80, 278, 294, 608). Each pixel corresponds to an area on the surface and the plurality of pixels together form a field of view (86, 418, 606) that covers substantially the entire surface.</p> |
