| 摘要 |
The invention relates to a micromechanical actuator array with hydraulic drive, essentially comprising an actuator plate, formed in two-dimensions, with a number of flexible and inflexible regions, arranged in a matrix. The actuator plate encloses a number of pressure chambers of a hydraulic drive and the flexible regions are separated from each other by a first inflexible region and the flexible regions enclose at least one second inflexible region. An external edge of the flexible regions encloses a first surface with a first geometry and a first focal point and an external edge of the second inflexible region encloses a second surface with a second geometry and a second focal point. Furthermore a braille array, a valve array, an electrical relay and a mirror array are produced using the micromechanical actuator array. |
