METHOD OF FABRICATING CAPILLARY DISCHARGE PLASMA DISPLAY PANEL USING COMBINATION OF LASER AND WET ETCHINGS

摘要

A method of fabricating a plasma display panel having a substrate (41) includes the steps of forming an electrode (42) on the substrate (41), forming a dielectric layer (43) on the substrate (41) including the electrode (42), forming at least one capillary (44) in the dielectric layer (43) using dry-etching, wherein the capillary (44) and the electrode (42) are separated apart by a portion of the dielectric layer (43), and sequentially removing the portion of dielectric layer (43) to expose the electrode (42) through the capillary (45).