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发明名称
SUBSTRATE, STAGE DEVICE, METHOD OF DRIVING STAGE, EXPOSURE SYSTEM AND EXPOSURE METHOD
摘要
申请公布号
KR20020038592(A)
申请公布日期
2002.05.23
申请号
KR1020017016269
申请日期
2001.12.18
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
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