PERSONAL GUIDED VEHICLE FOR TRANSFERRING WAFER CARRIER

摘要

PURPOSE: A personal guided vehicle for transferring a wafer carrier is provided to successively and easily load and unload the wafer carrier, by making an operator drive a handle and a lever installed in the personal guided vehicle in loading/unloading the wafer carrier after the docking of the wafer carrier. CONSTITUTION: Frames having a pillar type for supporting the outer portion of a hexahedron are formed in a structure(10). A plate is attached to a predetermined portion at a side of the lower portion of the structure. A supporting axis(14) is vertically installed on the plate. A vertical driving unit performs a vertical driving on the supporting axis, coupled to the supporting axis. A plurality of mounting units(18) mount a carrier having a wafer, connected to the vertical driving unit and installed in a horizontal direction. A plurality of sliding arms(26) are placed on the structure. The sliding arms perform a right/left driving process and a forward/backward driving process to horizontally transfer the wafer carrier to a position to which the mounting unit is transferred. Four casters(28) transfer the carrier placed on the mounting unit of the structure, installed near the lower vertex of the structure. A handle(20) presses the structure to transfer the carrier, installed at a side of the upper portion of the structure.