| 摘要 |
PROBLEM TO BE SOLVED: To prevent withdrawing of dust or breaking in TFTs in a COA(color filter on array) or HA(high aperture) method by suppressing the charge amount in a laminated body. SOLUTION: The method for manufacturing a color filter includes a process of forming a laminated body to tightly adhering a photosensitive transfer material having at least a photosensitive resin layer on a temporary supporting body to the surface of a substrate with the substrate surface in contact with the photosensitive resin layer so as to obtain a laminated body, a peeling process to peel the temporary supporting body from the laminated body, and an exposure and development process to form a color filter on the substrate surface by exposing and developing the photosensitive resin layer. In the peeling process, the temporary supporting body is peeled while the substrate side of the laminated body is held by a spot-like or linear substrate holding means and while the peeling part and its surrounding region between the photosensitive resin layer and the temporary supporting body are subjected to static eliminating treatment by a discharging apparatus. |
