SYSTEM FOR SUPPLYING WAFER PROCESSING DEIONIZED WATER WITH CAPABILITY OF RECIRCULATING WASTE WATER

摘要

PURPOSE: A system for supplying wafer processing deionized(DI) water with the capability of recirculating waste water is provided to decrease the number of processes for fabricating DI water and reduce waste water processing cost by recirculating the waste water generated in a sawing process and using the recirculated waste water as DI water. CONSTITUTION: Waste water is separately collected and stored in a waste storage tank(41). A pump(42) supplies pressure for supplying the waste water stored in the waste storage tank. A micro filter(43,44) eliminates a floating material included in the waste water supplied from the pump. A resin tower(45) ion-exchanges microscopic particles or ions not filtered by the micro filter to generate good-quality DI water. A resin filter(46) filters the resin leaking out from the resin tower and supplies the filtered resin to a concentrated water storage tank.