摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a carbon rod for deposition is hindered from being deposited by breakage due to push force and softening at a high temperature in a sample preparation device depositing a conductive material on a sample. SOLUTION: In a carbon rod 70 shaped into a rectangular parallelepiped as a whole, slits Sa, Sb and Sc are formed parallel to each other at distances from a flat face touching the tip of a carbon rod 6 having a sharp tip. The depth of each slit is set to be greatly deeper beyond the contact point between the carbon rod 6 and the carbon rod 70. The slits are formed so that a thickness of the carbon rod between the tip face and the slit and that between respective slits are slightly thicker than a thickness matching a carbon quantity used in approximately one vapor deposition. The carbon rod 6 is installed to a supporting electrode 4, while the carbon rod 70 is installed to a supporting electrode 5. Electric current is fed to the carbon rods 6 and 70 from a power source 8 via the supporting electrodes 4 and 5.
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