| 摘要 |
PROBLEM TO BE SOLVED: To provide an online film thickness measuring method and a device thereof that can measure an accurate film thickness even if an irregular change is provided on a band-like film formed substance on which a thin film is formed. SOLUTION: Transmission degree of light at the same points on a base film 1, which are on a front point and a back point of a place where a magnetic substance layer 5 is formed on the base film 1, is measured by measuring instruments 6, 7, and both measured values of the measuring instruments 6, 7 are compared to be computed by a computer 9. Thereafter, accurate film thickness of the magnetic substance layer 5 is calculated.
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