| 摘要 |
PROBLEM TO BE SOLVED: To provide a near field probe little generating background light. SOLUTION: This near field probe 10 has a cantilever lever part 14 extending from a support part 12, and the lever part 14 has a probe 16 at the tip. The leer part 14 is, for example, formed by a silicon nitride film 22 and a scatterer forming thin film 24, and the scatterer body forming thin film 24 includes a spherical scatterer body 26 in a part positioned at the tip of the probe 16. The near field probe 10 is manufactured by coating the surface of the probe of a SiN-made AFM cantilever generally available from the market with the scatterer forming thin film 24, and radiating active light such as a laser beam, an ion beam or the like from the axis of the probe 16 to be focused on the tip of the probe 16, and a scatterer 26 is formed in the interior of the scatterer forming thin film 24 by irradiation of active light. The scatterer forming thin film 24 is, for example, a multiplayer film of ZnS-SiO2/Ag2/ZnS-SiO2.
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